Year: 2010
ISBN: 978-5-9963-0032-7
Pages: 300
Subject: Nanotechnology
Format: 145 x 215 mm
Cover: hardcover
Series: Nanotechnology
In the light of currently known nanotechnologies and micromechanics processes and systems of the vacuum-plasma etching, which find wide application in manufacture of modern superlarge integrated schemes, products of microelectromechanical systems and nanosystems are considered. Analysis of ways of meeting vacuum-technical requirements to such processes, description of control and diagnostic methods are provided. The book is intended for students of the higher schools studying processes of micro- and nanoelectronics, post-graduate students, engineers and the scientists occupied in the technology of integrated schemes and micromechanics.
Alexey I. Mochalov: Doctor of Engineering Sciences, Professor of the Moscow Institute of Electronic Technology.
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