Year: 2010
ISBN: ISBN 978-5-9963-0341-0
Pages: 392 + 252
Subject: Nanotechnology
Format: 145 x 215 mm
Cover: Hardcover
Series: Nanotechnology
The book presents physical and chemical bases of microelectronics technology. Technological processes classification is described. Criterions defining the character of their course and quality of products are formulated. Special attention is given to the processes of epitaxy, thin films obtaining, welding and soldering, machining and clearing of materials surface, as well as alloying, modifying and a photolithography. Mechanisms of electric fields and radiations influence on some of these processes are reviewed. Division of the book into 2 volumes is caused by large content, at the same time each volume has its separate significance.
The book is intended for the students studying technology of microelectronics and radio engineering microelectronic devices, post-graduate students and specialists.
Back to the section